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Sputtering Targets for Glass Coating

Glass Coating
Heraeus is the world’s leading supplier of sputtering targets for the glass coating industry. When the first industrial glass coatings were developed, Heraeus was there – involved in development and production of coating materials for architectural glass, automotive glass, photovoltaics, mirrors and other speciality coatings.
We have set milestones in large area coating right from the beginning of industrial glass coating, and continue to be a leading innovator today. Our product portfolio includes all the key pure metals, as well as popular alloys and ceramics. Our sputtering targets are produced in different shapes (planar and rotatable) and sizes – up to 13.2 ft / 4 meters in length.
Heraeus deploys numerous state-of-the-art production capabilities such as casting, powder metallurgy, spraying, various transforming techniques and bonding.

Applications
- Architectural Glass (low-e, solar control)
- Automotive Glass
- Anti-reflective and Antistatic Coatings (ARAS)
We have developed proprietary production processes for all these target materials. This guarantees consistent products, which correspond exactly to our customers' specifications – lot to lot, target to target.
Planar Sputtering Targets
Ag, Ag-alloys, Al, AlCu, AlSi, Bi, BiMn, CLATO®, Cr, Cu, CuAl, ITO, Mo, Nb, NiCr, Si, SISPA®, Sn, SnZn, SST, Ti, W, Zn, ZnAl, ZAO®, Zn , ZnSn, Zn-alloys, Zr
Rotatable Sputtering Targets
Ag, Al, CLATO®, Cu, Mo, NiCr, Si, SiAl, Sn, SnZn, SST, Ti, ZAO®, Zn, ZnAl, ZnSn, Zn-alloys
Sputtering Targets for Glass Coating
Standard Materials for Glass Coating Applications
(other materials available on request)
Material Name Composition [w%] Purity Rotatable
Planar
Ag Silver 3N7
Ag-alloys Silver alloys * *
Al Aluminum 3N, 4N
Au Gold 4N
Bi Bismuth 4N *
Cr Chromium 2N5 - 4N
Cu Copper *
CuAl Copper-Aluminum * *
In Indium 4N, 5N *
InSn Indium-Tin InSn 10w% 3N *
ITO Indium Tin Oxide In2O3 / SnO2 10w% 3N, 4N *
Mo Molybdenum 3N5
Nb Niobium 2N7 *
NiCr Nickel-Chromium NiCr 20w% 2N8
NiV Nickel-Vanadium NiV 7w% 2N8
Si Silicon sprayed 4N
SiAl Silicon-Aluminum sprayed SiAl 8 - 10 w% 3N
SISPA® Silicon-Aluminum cast SiAl 10 w% 3N
Sn Tin 3N
SST Stainless Steel
Ti Titanium 2N4
TiOx Titanium Oxide 2N8
W Tungsten 3N *
ZAO® Zinc Oxide Aluminum Oxide ZnO / Al2O3 (0.5 – 2) 3N
Zn cast Zinc cast 4N
Zn sprayed Zinc sprayed 3N
ZnAl cast Zinc-Aluminum cast ZnAl (0.5 – 2) w% 4N
ZnAl sprayed Zinc-Aluminum sprayed ZnAl (0.5 – 2) w% 3N
ZnSn Zinc-Tin 3N
Zn-alloys Zinc-alloys 3N
Zr Zirconium 2N2 (excl. Hf)
* on request