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Sputtering Targets for Displays

Displays
Embedded in Heraeus' 150 years of business in advanced materials technology, Sputtering Targets for Display products belong to the rather young product groups.
Based on decades of hands-on experience with precious and special metals, Heraeus is able to offer tailor-made targets that meet the special requirements of the display industry.

Applications

LCD (TFT & Color Filter)
PDP (PDP-Filter)
OLED
Touch Panel
Electronic Paper

Layer-Functions

Transparent high refractive index
Transparent Conductive Oxide (TCO)
Adhesion and barrier
Black Matrix
Electrodes & interconnects (metal & metal alloys)
Be it high purity metals, sophisticated alloys, ceramics;
be it planar, tubular, extremely homogenous designs or very large form factors up to 2500 x 2800 mm,
Heraeus masters the task.
As part of the worldwide network of Heraeus locations, our display target business supports you with close-to-market production facilities, R&D labs, bond shops and a global business structure.

Standard Materials

(Other materials available on request)
Material Name Purity
Al Aluminium 4N, 5N
Au Gold 4N
Cr Chromium 3N7
Cu Copper 4N, 4N7
Mo Molybdenum 3N5
Nb Niobium 3N
NbO Niobium Oxide 3N5, 4N
Si Silicon 5N
Ta Tantalum 3N5
Ti Titanium 2N7, 3N, 4N5
TiO Titanium Oxide 3N5, 3N
ZnAlO Zinc Aluminium Oxide 3N

New Materials

Metal- and ceramic-alloys in various compositions
Tube targets (metals, ceramics, and their alloys) bonded on backing tubes or monolytic
Spraying and casting technology for tube target production
Sputtering Targets for Displays Applications